MONOLITHICALLY INTEGRATED LED, WAVE-GUIDE AND PHOTODETECTOR OPTICAL-SYSTEM FOR NEAR-INFRARED BIOSENSOR

Authors
HUERTAS P MIER G DOTOR ML ANGUITA JV GOLMAYO D BRIONES F
Citation
P. Huertas et al., MONOLITHICALLY INTEGRATED LED, WAVE-GUIDE AND PHOTODETECTOR OPTICAL-SYSTEM FOR NEAR-INFRARED BIOSENSOR, Sensors and actuators. A, Physical, 37-8, 1993, pp. 512-515
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
37-8
Year of publication
1993
Pages
512 - 515
Database
ISI
SICI code
0924-4247(1993)37-8:<512:MILWAP>2.0.ZU;2-4
Abstract
A novel monolithically integrated optoelectronic microsensor is fabric ated on GaAs substrates by means of a single epitaxial process step (a tomic layer molecular beam epitaxy, ALMBE), conventional lithography a nd selective chemical etching techniques. The microsensor integrates a n IR (0.86-1.1 mum) lateral emitting diode linked through a leaky opti cal waveguide to a photodiode.