OXYGEN SOLUBILITIES IN SI MELT - INFLUENCE OF SB ADDITION

The oxygen solubility in liquid silicon, both undoped and Sb-doped, in equilibrium contact with SiO2 has been analyzed after quenching by th e SIMS (secondary ion mass spectroscopy) technique in order to investi gate the influence of antimony addition on the oxygen solubility. It h as been shown that oxygen solubility in undoped silicon melt increases from 2.08 X 10(18) to 2.29 X 10(18) atoms/cm3 upon temperature increa ses from 1447 to 1542-degrees-C. The influence of antimony addition in the same temperature range was twofold. Addition of less than 1 at.% Sb caused practically no change in oxygen solubility, while addition o f more than 1.3 at.% Sb appreciably increased both its level and its t emperature coefficient.