IMPROVED ANALYSIS OF MICROBEAMS UNDER MECHANICAL AND ELECTROSTATIC LOADS

Stretching effects in axially constrained doubly clamped microbeams ha ve been analysed for mechanical and electrostatic loads. A computer co de based on the shooting method, a numerical integration procedure, ha s been developed for calculating the induced tension, deflections and stresses. Analytic solutions for concentrated force, distributed press ure and electrostatic loading were derived and verified by numerical s imulation. Typical dimensions for microbeams considered are 200 mu m x 45 mu m x 2 mu m. Various cases have been evaluated, with and without induced tension and/or residual strain. Displacements and stresses ar e reduced when induced tension is included and are considerably smalle r with intrinsic tension.