Fractal capacitors

Citation
H. Samavati et al., Fractal capacitors, IEEE J SOLI, 33(12), 1998, pp. 2035-2041
Citations number
8
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE JOURNAL OF SOLID-STATE CIRCUITS
ISSN journal
00189200 → ACNP
Volume
33
Issue
12
Year of publication
1998
Pages
2035 - 2041
Database
ISI
SICI code
0018-9200(199812)33:12<2035:FC>2.0.ZU;2-#
Abstract
A linear capacitor structure using fractal geometries is described. This ca pacitor exploits both lateral and vertical electric fields to increase the capacitance per unit area. Compared to standard parallel-plate capacitors, the parasitic bottom-plate capacitance is reduced. Unlike conventional meta l-to-metal capacitors, the capacitance density increases with technology sc aling. A classic fractal structure is implemented with 0.6-mu m metal spaci ng, and a factor of 2.3 increase in the capacitance per unit area is observ ed. It is shown that capacitance boost factors in excess of ten may be poss ible as technology continues to scale, A computer-aided-design tool to auto matically generate and analyze custom fractal layouts has been developed.