Ion probe diagnostics of laser ablated plumes for thin carbon films deposition

The propagation of the carbon plumes in argon atmosphere used for film grow th by pulsed laser ablation deposition (PLAD) is studied using ion probe. S patial and angle resolved analysis of plasma parameters as a function of ar gon gas pressure is presented. The electron temperature is strongly depende nt on the angle with target surface normal as well as the distance from the target surface. The forward directed nature of the PLAD process is strongl y influenced by the pressure of the ambient gas. The plasma parameters are used to explain the effect of ambient gas pressure on the characteristics o f the deposited film.