PROPOSAL OF A NEW SELF-LIMITED GROWTH AND ITS APPLICATION TO THE FABRICATION OF ATOMICALLY UNIFORM QUANTUM NANOSTRUCTURES

A new self-limited growth technique based on control of surface migrat ion in flow rate modulation epitaxial growth on nonplanar substrates i s proposed. The proposed self-limited growth is experimentally confirm ed by growing AlGaAs/GaAs quantum wires on V-grooved substrates. Using this new self-limited growth technique, atomically uniform semiconduc tor quantum nanostructures are expected to be fabricated easily.