High-temperature tolerant diamond diode for carbon monoxide gas detection

A high-temperature tolerant microelectronic carbon monoxide gas sensor has been developed. This device is based on a diamond diode in the form of cata lytic-metal/adsorptive-oxide/intrinsic-diamond/semiconductor-diamond struct ure. The gas sensing performance and detection mechanisms have been studied over a wide temperature range (50-500 degrees C). The gas sensitivity of t he sensor is large, fast, repeatable, and reproducible. Gas detection mecha nism is attributed to the modification of the oxygen vacancies in the SnOx layer of the sensor. This diamond diode sensor can be utilized in applicati ons that require a sensor to operate at a wider operating temperature range . (C) 1998 American Institute of Physics. [S0021-8979(98)06624-9].