Ml. Free et Do. Shah, Adsorption and desorption of cetyl pyridinium ions at a tungsten-coated silicon wafer surface, J COLL I SC, 208(1), 1998, pp. 104-109
The use of surfactants to reduce the number of residual particles following
chemical-mechanical planarization during integrated circuit manufacturing
is relatively new. Recent results using cetyl pyridinium chloride and other
cationic surfactant molecules show that surfactants are very effective in
reducing the number density of residual polishing particles; The effectiven
ess of the surfactants is related to their ability to adsorb on the substra
te surface. The contact angle and spectroscopic data in this study show tha
t cetyl pyridinium ions can be readily adsorbed or desorbed from a chemical
-vapor-deposited tungsten surface by controlling the concentration of other
cations in solution. The mechanism for surfactant desorption is Likely a c
ompetition between the cationic surfactant ions and other cations in soluti
on. (C) 1998 Academic Press.