Molecular dynamics evaluation of self-sputtering of beryllium

The self-sputtering of Be was simulated by a molecular dynamics (MD) approa ch with the use of a newly developed 2-body Be potential. Incident angle de pendence of the sputtering yield was evaluated for the incident particle en ergies of 50, 100, and 300 eV with respect to the (0 0 1) and (0 1 0) surfa ces of the hcp crystal. The calculated sputtering yields are in good agreem ent with both experimental estimates and the TRIM.SP evaluations. Small but distinct dependence on the surface type is observed. The calculated reflec tion coefficient become at grazing angles significantly larger than the TRI M.SP evaluation. (C) 1998 Elsevier Science B.V. All rights reserved.