Tungsten self-sputtering yield with different incidence angles and target temperatures

The self-sputtering of different types of tungsten due to 1 keV W+ bombardm ent at temperatures of 25 degrees C and 600 degrees C and incident angles i n the range of 30-60 degrees was studied by means of the weight loss method . The experimental data at room temperature agreed reasonably with the resu lts of TRIM calculations. Enhanced self-sputtering yields due to beam-induc ed desorption of WO2 were found at a temperature of 600 degrees C. The weig ht loss of W-Cu composite is larger than that of the CVD-W and ps-W under t he same irradiation conditions due to the selective removal of copper. (C) 1998 Elsevier Science B.V. All rights reserved.