Multilayer thin-films with chevron-like microstructure

Direct current magnetron sputtering and evaporation have been used to form thin films with a columnar structure having a chevron-like morphology. This type of morphology is one of the possible types present in sculptured thin films. The tilt angle of the columnar grains was controlled by variation o f the angle of incidence of the depositing species, and by carrying out the deposition at a number of different angles of incidence films having a che vron-like microstructure were formed. Films of copper, aluminium and alumin a were produced by the technique described here, it is demonstrated that un der certain conditions it is possible to grow films that are virtually free of renucleation at the planes where the atom flux changes direction (kink planes). The morphology of the individual grains in the chevron-like films agrees with the zone model developed for more conventional films. The chevr on structures were also quite visible in amorphous films, and in this case the 'grain boundaries' consist of regions of lower density. A few examples of potential applications for these chevron films are discussed.