The correlation between the laser energy density and the properties of diamond-like carbon films with Nd : YAG (355 nm) excimer laser

Authors
Jung, HS Park, HH Pang, SS Lee, SY
Citation
Hs. Jung et al., The correlation between the laser energy density and the properties of diamond-like carbon films with Nd : YAG (355 nm) excimer laser, J KOR PHYS, 33, 1998, pp. S423-S426
Citations number
4
Categorie Soggetti
Physics
Journal title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
ISSN journal
03744884 → ACNP
Volume
33
Year of publication
1998
Supplement
S
Pages
S423 - S426
Database
ISI
SICI code
0374-4884(199811)33:<S423:TCBTLE>2.0.ZU;2-V
Abstract
Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm(2). Collected from analytical resul ts, laser energy density is seen to play an important role in the formation of sp(3) carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.