Fabrication of FED panel and vacuum evaluation inside the panel

In this paper, glass packaging of 0.7 inch diagonal Si or Mo FEA using a so ldering method is described. In the glass packaging process, we need to kno w the real vacuum level inside the FED panel because it dominates the perfo rmance of FED after the glass packaging process. Also, we have chosen the e mission current calibration method (ECCM) to measure the vacuum level insid e the FED panel. By using this method, the activation effect of a getter wa s evaluated quantitatively. Getter activated at a relatively low temperatur e was shown to act as a good in-situ mini-pump during the life of FED.