Design and fabrication of the thin-film micromirror array-actuated for large projection displays

The Thin-film Micromirror Array-actuated (TMA) is a new reflective type lig ht modulator that uses micromachined thin film piezoelectric actuators in c onjunction with over 300,000 micromirrors. A working prototype of TMA displ ay system with three TMA modules shows the world best light efficiency at t he present time, which is more than 7 lumen per watt light efficiency. Proj ectors and projection TVs with TMAs will be the most promising device which will provide clear display of electronic image at normal room light condit ion.