Nanocrystalline TiNi thin films were produced by cluster beam deposition. A
pulsed are gas aggregation source was used to generate intense and stable
supersonic cluster beams. With this technique,films characterized by crysta
llite sizes of a few tens of nanometers can be obtained without recrystalli
zation by thermal annealing. Films maintain the stoichiometry of the origin
al TiNi alloy. Oxygen contamination is observed. (C) 1998 Acta Metallurgica
Inc.