Synthesis of nanocrystalline TiNi thin films by cluster beam deposition

Citation
E. Barborini et al., Synthesis of nanocrystalline TiNi thin films by cluster beam deposition, NANOSTR MAT, 10(6), 1998, pp. 1023-1031
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
NANOSTRUCTURED MATERIALS
ISSN journal
09659773 → ACNP
Volume
10
Issue
6
Year of publication
1998
Pages
1023 - 1031
Database
ISI
SICI code
0965-9773(199808)10:6<1023:SONTTF>2.0.ZU;2-M
Abstract
Nanocrystalline TiNi thin films were produced by cluster beam deposition. A pulsed are gas aggregation source was used to generate intense and stable supersonic cluster beams. With this technique,films characterized by crysta llite sizes of a few tens of nanometers can be obtained without recrystalli zation by thermal annealing. Films maintain the stoichiometry of the origin al TiNi alloy. Oxygen contamination is observed. (C) 1998 Acta Metallurgica Inc.