VUV intensity measurement of a 172 nm Xe excimer lamp by means of oxygen actinometry

The light power of a xenon excimer VUV source was determined by means of ox ygen actinometry. It was found that the method is not applicable for direct measurement of the light power mainly because of the side-reactions of ozo ne with oxygen atoms. Model calculations led to a simple equation between t he quantum yield and the concentrations of ozone and oxygen. The correlatio n between the overall quantum yield and the ozone and oxygen concentration at room temperature is Phi = 2 - 1.10[O-3]/[O-2](1.94), and at atmospheric oxygen pressure Phi = 2 - 520 [O-3].