Azide-containing phosphine oxides for photoresists-diffusants: Synthesis and photochemical and diffusion characteristics

Methods were developed for preparing azide-containing azo and azomethine de rivatives of phosphine oxides. There physicochemical characteristics were s tudied, and the quantum yields of photolysis were determined. These compoun ds are effective photochemical cross-linking agents for ep oxycyclopolyisop renes. The diffusion characteristics of these compounds in doping of silico n semiconductor structures were studied.