CuInS2-based thin-film solar cells are presented with 11.1% total area effi
ciency or 12.5% active area efficiency. This is the best efficiency reporte
d so far for this type of solar cell. The technology is based on a sequenti
al process using d.c. magnetron sputtering of the metals and sulphurization
in elemental sulphur vapour without the use of a toxic gas. Absorber layer
s and solar cells with precursor atomic copper to indium ratios between 1.0
and 1.8 are analysed. The best cells with fewest defects are made from the
most copper-rich CuIn precursor layers. The solar cell performance, howeve
r, decreases only slowly for small deviations of the Cu/In ratio from the o
ptimum value.