Amorphous lithium cobalt and nickel oxides thin films: preparation and characterization by RBS and PIGE

Authors
Benqlilou-Moudden, H Blondiaux, G Vinatier, P Levasseur, A
Citation
H. Benqlilou-moudden et al., Amorphous lithium cobalt and nickel oxides thin films: preparation and characterization by RBS and PIGE, THIN SOL FI, 333(1-2), 1998, pp. 16-19
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
333
Issue
1-2
Year of publication
1998
Pages
16 - 19
Database
ISI
SICI code
0040-6090(19981123)333:1-2<16:ALCANO>2.0.ZU;2-L
Abstract
Thin films have been deposited by radio-frequency magnetron sputtering, usi ng LiCoO2, LiNiO2 and LiNi0.7Co0.3O2 targets, in argon or Ar/O-2 gas mixtur e. The composition of the thin films has been determined by proton induced gamma-ray emission (PIGE) analysis and by Rutherford backscattering spectro scopy (RBS). The oxygen partial pressure in the plasma influences the compo sition of the thin films; these results an discussed with regard to the fil m morphology. (C) 1998 Elsevier Science S.A. Ail lights reserved.