Oxy-acetylene flame chemical vapour deposition of diamond film II: the influence of deposition parameters on diamond composition

Different surface spectroscopies (Raman, valence band photoemission, Auger and X-ray absorption) were used to determine the composi tion of diamond fi lms. The results obtained permit comparisons to be made between the differe nt techniques used and with the morphology conclusions of the Part I. All t he techniques are in agreement and are confirmed to measure the amount of d iamond in the films. However, there are some differences between Raman spec troscopy and X-ray absorption due to their different sensitivity to defects in the diamond structure. This could cast doubt on the significance of Ram an quality, used in many papers. We consider there to be a need for more in -depth research as XAS is a technique which presents many advantages for mo nitoring CVD diamond quality. With the best process parameter values, these techniques demonstrate that flame CVD produces diamond films with very low graphite or amorphous carbon contents. Acetylene flame CVD could therefore be a good method for depositing diamond films for specific applications. ( C) 1998 Elsevier Science S.A. All rights reserved.