Formation and characterization of multiphase film properties of (Ti-Cr)N formed by cathodic arc deposition

A study of tribological properties resulting from a combination of titanium nitride and chromium nitride phases in thin films is reported here. Deposi tion of (Ti, Cr)N on M-50 steel substrates was performed in an industrial m ulti-source steered cathodic are deposition system. The nitrogen content of all films was maintained at about 49% by feed-back process control, Cr and Ti are sources were used to deposit thin films (1-2 mu m) onto a rotating substrate in a pressure regulated nitrogen gas background. Film properties (e.g, stoichiometry, microstructure, friction, wear, and hardness) are dete rmined by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), ball-on-disk tribometer and nanoindentation. This study focuses on the wear behavior of these films at room temperature in atmospheric air. XRD data s uggest that TiN, CrN and Cr2N are the two major phases present in these fil ms, A region of Ti/Cr where a minimum friction and wear rate was observed. Scanning electron micrographs of the wear track of these mi?;ed phase films reveal plastic deformation of wear debris as the lending cause for this lo w friction. (C) 1998 Elsevier Science S.A. All rights reserved.