Fabrication of silicon MOSFETs using soft lithography

Authors
Jeon, NL Hu, JM Whitesides, GM Erhardt, MK Nuzzo, RG
Citation
Nl. Jeon et al., Fabrication of silicon MOSFETs using soft lithography, ADVAN MATER, 10(17), 1998, pp. 1466-1469
Citations number
12
Categorie Soggetti
Multidisciplinary,"Material Science & Engineering
Journal title
ADVANCED MATERIALS
ISSN journal
09359648 → ACNP
Volume
10
Issue
17
Year of publication
1998
Pages
1466 - 1469
Database
ISI
SICI code
0935-9648(199812)10:17<1466:FOSMUS>2.0.ZU;2-R