We evaluated the possibilities of preparing single analyte molecules on sil
icon surfaces for chemical analysis based on fluorescence measurement. A si
ngle-molecule imaging technique involving far-field optical microscopy was
used to visualize rhodamine B (rhB) molecules in submonolayers prepared on
Si wafers. This technique revealed that fluorescence of solvent-free, adsor
bed rhB molecules in submonolayers appeared in two different forms: isolate
d fluorescent spots in which a countable number of independent single rhB m
olecules were grouped together and diffused fluorescence in the region with
no fluorescent spots. On the basis of the fluorescence imaging and time-re
solved fluorometry of individual fluorescent spots, together with examinati
on of light-scattering sites on Si wafers, we discussed the possibility tha
t the isolated fluorescent spots occurred on crystal-originated sites dotte
d on Si wafers. Our findings should provide guiding principles for developi
ng vials for single analyte molecules on Si surfaces.