The irradiation effects of intense ultraviolet (UV) light from ArF and KrF
excimer lasers on poly(vinylidene fluoride) (PVdF) were studied. The optica
l absorption spectroscopy made it clear that irradiation with ArF and KrF e
xcimer laser light mainly caused the formation of diene and triene structur
es, respectively. From the dependence on the laser intensity it was found t
hat ArF and KrF laser-induced reactions proceeded via single-photon and mul
ti-photon processes, respectively. The wavelength dependence was explained
by photochemical and photothermal effects of ArF and KrF excimer lasers, re
spectively. These results indicate that the distinction of the photo-reacti
on between the two is closely related to the difference in the absorption s
ites.