Monitoring and control of semiconductor manufacturing processes

Authors
Limanond, S Si, J Tsakalis, K
Citation
S. Limanond et al., Monitoring and control of semiconductor manufacturing processes, IEEE CONT S, 18(6), 1998, pp. 46-58
Citations number
66
Categorie Soggetti
AI Robotics and Automatic Control
Journal title
IEEE CONTROL SYSTEMS MAGAZINE
ISSN journal
02721708 → ACNP
Volume
18
Issue
6
Year of publication
1998
Pages
46 - 58
Database
ISI
SICI code
0272-1708(199812)18:6<46:MACOSM>2.0.ZU;2-J