Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations

Authors
Pender, JTP Brake, ML
Citation
Jtp. Pender et Ml. Brake, Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations, IEEE PLAS S, 26(5), 1998, pp. 1583-1585
Citations number
12
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
26
Issue
5
Year of publication
1998
Pages
1583 - 1585
Database
ISI
SICI code
0093-3813(199810)26:5<1583:FZSORF>2.0.ZU;2-S
Abstract
A zero-dimensional model quickly estimates changes in species concentration s in CF4 radio frequency glow discharges. The code simulated experimental c onditions of 100 mtorr and 5-20 W discharges. The results show that the sim ple model predicts actinometry results if the most accurate electron energy distribution function is used.