On the axial structure of a nitrogen surface wave sustained discharge: Theory and experiment

Citation
E. Tatarova et al., On the axial structure of a nitrogen surface wave sustained discharge: Theory and experiment, J APPL PHYS, 85(1), 1999, pp. 49-62
Citations number
41
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF APPLIED PHYSICS
ISSN journal
00218979 → ACNP
Volume
85
Issue
1
Year of publication
1999
Pages
49 - 62
Database
ISI
SICI code
0021-8979(19990101)85:1<49:OTASOA>2.0.ZU;2-1
Abstract
A model for a surface wave sustained nitrogen discharge accounting in a sel f-consistent way for electron and heavy particles kinetics and discharge el ectrodynamics has been developed. The system under analysis is a plasma col umn produced by a traveling, azimuthally symmetric (m=0 mode) surface wave. The model is based on a set of coupled equations consisting of the electro n Boltzmann equation and the rate balance equations for the most important excited species-vibrationally, N-2(X(1)Sigma(g)(+), nu), and electronically excited states, N-2(A(3)Sigma(u)(,)(+) a'Sigma(u)(-), B(3)Pi(g), C(3)Pi(u) , a 1 Pi(g))-and charged particles (e, N-2(+), N-4(-)) in the discharge. El ectron collisions with nitrogen molecules of the first and the second kind and electron-electron collisions are accounted for in the Boltzmann equatio n. The field strength necessary for steady-state operation of the discharge is obtained from the balance between the total rates of ionization (includ ing direct, stepwise, and associative ionization) and of electronic losses (due to diffusion to the wall and bulk recombination). The transfer of wave power to the discharge occurs through collisional processes, thus the set of equations is closed by an ordinary differential equation (stemming from basic electrodynamical relations) which associates the axial gradient of th e electron density to the wave attenuation. As a result, a self-consistent interdependence between wave propagation and discharge characteristics is o btained over the whole plasma column. The axial profile of the gas temperat ure and the initial value of the electron density at the position of the wa ve launcher are used as input parameters. The model determines the axial st ructure of the discharge-axial variations of the electron energy distributi on function and its moments, the vibrational distribution function of the e lectronic ground state, and the densities of the most important electronica lly excited states and positive ions-consistently with the electric field a nd the surface wave dispersion characteristics. A spatially resolved experi mental investigation of the electron energy distribution function, the gas and the vibrational temperatures, and the population densities of some elec tronically excited states along with wave propagation characteristics measu rements provides a verification of the model. Strong correlation between di fferent plasma balances, governing the discharge production, and discharge electrodynamics-the basis of surface-wave discharge physics-has been demons trated both theoretically and experimentally. (C) 1999 American Institute o f Physics. [S0021-8979(99)02601-8].