Microfabrication of linear translator tuning elements in submillimeter-wave integrated circuits

A micromechanical planar tuning element has been developed and demonstrated in a fully monolithic 620-GHz integrated circuit, It allows for the mechan ical variation of the electrical length of a coplanar transmission line tun er and is called a sliding planar backshort (SPB). It consists of a movable patterned rectangular metal plate confined by polyimide flanges along two of its edges to allow guided linear translation along the length of a diele ctric-coated coplanar transmission line. Its fabrication involves an applic ation of sacrificial-layer and molding techniques to materials and processe s which are compatible with the fabrication of a nide range of submillimete r-wave integrated circuits. This is the first reported micromechanically ad justable tuning element demonstrated at submillimeter wavelengths. [319].