Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

This work concerns the alleviation of friction in a novel design of multist ator electrostatic wobble motor. The output torque and the kinematic accura cy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been d eveloped using an advanced LIGA technique to integrate polymethylmethacryla te (PMMA) cylinders into nickel micro structures. A new version of the micr omotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing sta bilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes. [334].