Ultrahigh-vacuum reaction apparatus to study synchrotron-radiation-stimulated processes

An ultrahigh-vacuum reaction apparatus to study synchrotron-radiation-stimu lated processes has been constructed and placed on beamline 4B of the synch rotron radiation storage ring (UVSOR) at the Institute for Molecular Scienc e. The apparatus is designed so that multiple synchrotron radiation precess es such as etching and chemical vapour deposition can be carried out succes sively without breaking the high vacuum. It is equipped with IR reflection absorption spectroscopy (IRRAS) apparatus and reflective high-energy electr on diffraction (RHEED) apparatus for in situ observations. The basic parame ters of the apparatus including etching and deposition rates have been meas ured. IRRAS using buried metal layer substrates has been confirmed to be a very useful method of analyzing the reaction mechanisms of the synchrotron- radiation-stimulated processes.