We have observed atomically flat gold surfaces deposited on Si (lll) 7x7 su
rfaces. These films are deposited by conventional evaporative deposition at
a pressure below 2 X 10(-6) Pa. The surface topography was taken by scanni
ng tunneling microscopy. Atomically flat terraces as large as 100 Angstrom
separated by steps were observed. This surface should provide a good substr
ate for scanning tunneling microscopy studies. (C) 1998 American Vacuum Soc
iety. [S0734-211X(98)05806-5].