Vacuum properties of a new panel structure for field emission displays

A new field emission display (FED) panel structure with an auxiliary space was developed in order to increase the conductance of the system for evacua tion and help evacuate the cavity inside the FED more effectively. Gas mole cules in the main space of the panel can move easily into the auxiliary spa ce through the multiple openings in the base plate and can then be pumped o ut through the exhaust tube at the auxiliary tank. For the very thin panel, in which the space between the face plate and base plate is 58 mu m, press ure drop characteristics during evacuation are very sensitive to the number of openings in the base plate. The main purpose of multiple openings in sh ortening evacuation time is to reduce pressure gradient inside the cavity. Additionally, the auxiliary space makes it easy to place various getters in side the FED panel and to maintain high vacuum for a prolonged lifetime of the FED. (C) 1998 American Vacuum Society. [S0734-211X(98)00406-5].