Large area high density quantized magnetic disks fabricated using nanoimprint lithography

Authors
Wu, W Cui, B Sun, XY Zhang, W Zhuang, L Kong, LS Chou, SY
Citation
W. Wu et al., Large area high density quantized magnetic disks fabricated using nanoimprint lithography, J VAC SCI B, 16(6), 1998, pp. 3825-3829
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
16
Issue
6
Year of publication
1998
Pages
3825 - 3829
Database
ISI
SICI code
1071-1023(199811/12)16:6<3825:LAHDQM>2.0.ZU;2-3
Abstract
A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), e lectroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.(2) and good uniformity over an area of 4 cm x 4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit /in.(2) The NIL molds for the perpendicular QMDs were fabricated using doub le NIL with a grating mold. The magnetic properties of both types of QMDs w ere studied by magnetic force microscopy. (C) 1998 American Vacuum Society. [S0734-211X(98)15406-9].