Gas cluster ion beams for processing new materials

Authors
Yamada, I
Citation
I. Yamada, Gas cluster ion beams for processing new materials, PHYSICS OF CLUSTERS, 1998, pp. 74-85
Categorie Soggetti
Current Book Contents
Journal title
PHYSICS OF CLUSTERS → ACNP
Year of publication
1998
Pages
74 - 85
Database
ISI
SICI code