INTERFERENCE TECHNIQUE FOR THE DETERMINAT ION OF THE FILM WIDTH AT 0.154 NM WAVE-LENGTH

Authors
BARANOV AM MIKHAILOV IF
Citation
Am. Baranov et If. Mikhailov, INTERFERENCE TECHNIQUE FOR THE DETERMINAT ION OF THE FILM WIDTH AT 0.154 NM WAVE-LENGTH, Pis'ma v Zurnal tehniceskoj fiziki, 22(23), 1996, pp. 60-63
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
22
Issue
23
Year of publication
1996
Pages
60 - 63
Database
ISI
SICI code
0320-0116(1996)22:23<60:ITFTDI>2.0.ZU;2-9