We have established a state-of-the-art InGaAs-InAlAs-InP HEMT MMIC fabricat
ion process for millimeterwave high-power applications, A two-stage monolit
hic microwave integrated circuit (MMIC) power amplifier with 0.15-mu m gate
length and 1.28-mm output periphery fabricated using this process has demo
nstrated an output power of 427 mW with 19% power-added efficiency at 95 GH
z, To our knowledge, this is the highest output power ever reported at this
frequency for any solid-state MMIC amplifier.