A physical model is developed to quantify the contribution of oxide-trapped
charge to enhanced low-dose-rate gain degradation in bipolar junction tran
sistors. Multiple-trapping simulations show that space charge limited trans
port is partially responsible for low-dose-rate enhancement. At low dose ra
tes, more holes are trapped near the silicon-oxide interface than at high d
ose rates, resulting in larger midgap voltage shifts. The additional trappe
d charge near the interface causes an exponential increase in excess base c
urrent and a resultant decrease in current gain for some NPN bipolar techno
logies. Space charge effects also may be responsible for differences in int
erface trap formation at low and high dose rates.