Radiation effects on surface micromachined comb drives and microengines

Surface micromachined comb drive and microengine fluence thresholds and fai lure modes were investigated in x-ray, electron, and proton total-dose envi ronments. Very high electron, and proton total-dose environments. Very high fluence levels were necessary to induce motion degradation or lockup for n ormal device biasing or operation. For the abnormal biasing of ungrounded o r partially grounded dice, significantly lower fault thresholds were observ ed, but still in a medium or high fluence range.