Transient analysis of LE-VGF growth of compound semiconductors

Citation
Y. Okano et al., Transient analysis of LE-VGF growth of compound semiconductors, INT J N M H, 8(8), 1998, pp. 956
Citations number
32
Categorie Soggetti
Mechanical Engineering
Journal title
INTERNATIONAL JOURNAL OF NUMERICAL METHODS FOR HEAT & FLUID FLOW
ISSN journal
09615539 → ACNP
Volume
8
Issue
8
Year of publication
1998
Database
ISI
SICI code
0961-5539(1998)8:8<956:TAOLGO>2.0.ZU;2-W
Abstract
A finite difference simulation for the bulk single crystal growth of indium phosphide by the liquid encapsulated vertical gradient freezing (LE-VGF) m ethod with a flat bottom crucible is presented. In order to treat a curvatu re interface, the boundary fixing method is applied. The transient behavior of the flow and temperature fields, the melt/crystal interface shape and t he growth rate during growth are studied numerically. The crystal growth ra te is not constant although the temperature lowering rate is constant The e ffect of crucible thickness, thermal conductivity of the crucible and tempe rature of the growth furnace wall on the crystal growth behavior are discus sed.