Recent trends and developments of microwave discharges

This paper is specially focused on large area microwave plasma. It briefly reviews recent results in the field, say since 1994, some of them are prese nted in this book, therefore only their basic principle are analysed. The d ischarges are classified according to operating principle, say, large diame ter plasma, radiating structures and based on evanescent waves structures. Basic properties and operating conditions are described. Most of these stru ctures have been designed as plasma reactors dedicated to plasma material p rocessing. Some of their performances will be given. As conclusions, we not e that a threshold power is required to fill the plasma chamber and regardi ng the plasma homogeneity the particular interest of high azimuthal modes.