Modeling of microwave reactors: microwave and kinetics in gas flow approaches

Authors
Gousset, G
Citation
G. Gousset, Modeling of microwave reactors: microwave and kinetics in gas flow approaches, J PHYS IV, 8(P7), 1998, pp. 21-32
Citations number
10
Categorie Soggetti
Physics
Journal title
JOURNAL DE PHYSIQUE IV
ISSN journal
11554339 → ACNP
Volume
8
Issue
P7
Year of publication
1998
Pages
21 - 32
Database
ISI
SICI code
1155-4339(199810)8:P7<21:MOMRMA>2.0.ZU;2-8
Abstract
The modeling of microwave plasma reactors must couple the external hf field to the, kinetics of charged particles and neutral species in presence of a aas flow. Various approaches to solve the non-linear coupled equations whi ch describe the physical situation, are proposed and discussed in this pape r.