Spectroscopical diagnostics of molecular microwave plasmas

The paper presents a review of recent results of emission (UV/visible) and absorption (visible and IR) spectroscopical investigations in molecular tub e and planar microwave discharges. As a new approach by emission spectrosco py seven band systems of the hydrogen molecule have been analysed to invest igate H-2 radiative characteristics and to determine the gas temperature co mpleted by Doppler broadening measurements of H-alpha D-alpha and H-2 spect ral lines. H-2 dissociation continuum was used for an estimation of the rad iative dissociation rate/degree. By absorption spectroscopy the populations of 4s ArI levels and concentrations of hydrocarbons (e.g. CH3, C2H2, CH4) were determined. In particular, investigations were focused on spatial dist ributions of plasma parameters.