Diagnostics of deposition plasmas

The diagnostics of plasmas used for deposition of thin layers and for the m odification of surfaces are summarised. First the various processes are dis cussed: plasma production, the fragmentation of injected monomers, the tran sport of radicals, the processes at the surface and the desorption of new m onomers in wall association. All these processes have characteristic time c onstants, short for the plasma processes and long for processes, which invo lve wall interactions and recirculation in the deposition chamber. Several typical results are given, which elucidate the processes and the applicabil ity of diagnostics.