Weakly ionized plasma arc heat transfer between geometrically dissimilar electrodes

A set of self-consistent conservation equations for the charged particle de nsities and the temperatures in a weakly ionized plasma between two dissimi lar electrodes is numerically solved using art orthogonal body-fitted coord inate system. The electron number density and temperature variation in the discharge gap, and the results for the heat transfer to the anode are prese nted. Results have been developed for a configuration that commonly arises in microelectronic manufacturing-a thin cylindrical anode together with a p lanar cathode.