Morphology of thin silver film grown by dc sputtering on Si(001)

Authors
Kundu, S Hazra, S Banerjee, S Sanyal, MK Mandal, SK Chaudhuri, S Pal, AK
Citation
S. Kundu et al., Morphology of thin silver film grown by dc sputtering on Si(001), J PHYS D, 31(23), 1998, pp. L73-L77
Citations number
21
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN journal
00223727 → ACNP
Volume
31
Issue
23
Year of publication
1998
Pages
L73 - L77
Database
ISI
SICI code
0022-3727(199812)31:23<L73:MOTSFG>2.0.ZU;2-Z
Abstract
The morphology and growth mechanism of silver films approximately 150 Angst rom in thickness on Si(001) substrates have been studied by atomic force mi croscopy and x-ray reflectivity. The thin films prepared by do sputtering a t room temperature are composed of islands of silver. The shape and size di stribution of these islands are studied using these two complementary measu rement techniques.