Dimethylzine (DMZn) was used as a p-type dopant in GaAs grown by low pressu
re metalorganic chemical vapor deposition (MOCVD). The influence of growth
parameters, such as, DMZn mole fractions, growth temperature, trimethylgall
ium (TMGa) mole fractions, substrate surfaces on the Zn incorporation have
been studied. The surface morphology of the layers was measured by scanning
electron microscopy (SEM). The hole concentrations and zinc (Zn) incorpora
tion efficiency are studied by using Hall effect, electrochemical capacitan
ce voltage (ECV) profiler, and low temperature photoluminescence (LTPL) spe
ctroscopy as functions of hole concentration (10(17) - 1.5 x 10(20) cm(-3))
and experimental temperatures (4.2-300 K). The hole concentration increase
s with increasing DMZn and TMGa mole fractions and decreases linearly with
increasing growth temperature. The main PL peak shifted to lower energy and
the full width at half maximum (FWHM) increased with increasing hole conce
ntration. An empirical relation for FWHM, Delta Ep, band gap, Eg, and band
gap shrinkage, Delta Eg in Zn doped GaAs as a function of hole concentratio
n were obtained. These relations are considered a useful tool to determine
the hole concentration in Zn doped GaAs by low temperature PL measurement.
The hole concentration increases with increasing TMGa mole fraction and the
main peak is shifted to lower energy side. (C) 1998 Elsevier Science S.A.
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