PLD of Pb(Zr,Ti)O-3 films: Phase formation on various substrates

Pulsed laser deposition (PLD) was used to deposit Pb(Zr52Ti48)O-3 (PZT-SA) thin films on various substrates (SrTiO3, MgO, polycrystalline Yttria-stabi lized ZrO2, (YSZ) and Al2O3). Furthermore, epitaxial YBa2Cu3O7-x on SrTiO3/ Al2O3, which is serving as bottom electrode, was covered with PZT by PLD. T he phase formation of two phases of PZT, the stable ABO, with perovskite st ructure and the metastable A(2)B(2)O(6)O phase with pyrochlore structure, w as investigated by XRD in dependence of substrate material, deposition temp erature and film thickness. The ferroelectric P(E)-hysteresis of the films was measured and discussed with respect to the above mentioned points. A fa voring of the perovskite phase formation was found on SrTiO3, a mixture of perovskite and pyrochlore on MgO, whereas YSZ substrates lead to the growth of 100% pyrochlore films under comparable deposition conditions. On polycr ystalline Al2O3 substrates an additional YBCO layer allows the deposition o f almost pure perovskite PZT. (C) 1998 Elsevier Science S.A. All rights res erved.