Pulsed laser deposition (PLD) was used to deposit Pb(Zr52Ti48)O-3 (PZT-SA)
thin films on various substrates (SrTiO3, MgO, polycrystalline Yttria-stabi
lized ZrO2, (YSZ) and Al2O3). Furthermore, epitaxial YBa2Cu3O7-x on SrTiO3/
Al2O3, which is serving as bottom electrode, was covered with PZT by PLD. T
he phase formation of two phases of PZT, the stable ABO, with perovskite st
ructure and the metastable A(2)B(2)O(6)O phase with pyrochlore structure, w
as investigated by XRD in dependence of substrate material, deposition temp
erature and film thickness. The ferroelectric P(E)-hysteresis of the films
was measured and discussed with respect to the above mentioned points. A fa
voring of the perovskite phase formation was found on SrTiO3, a mixture of
perovskite and pyrochlore on MgO, whereas YSZ substrates lead to the growth
of 100% pyrochlore films under comparable deposition conditions. On polycr
ystalline Al2O3 substrates an additional YBCO layer allows the deposition o
f almost pure perovskite PZT. (C) 1998 Elsevier Science S.A. All rights res
erved.