Hc. Li et al., Dielectric properties of SrTiO3 thin films grown on various perovskite electrodes by pulsed laser deposition, MAT SCI E B, 56(2-3), 1998, pp. 218-222
The dielectric properties of SrTiO3 (STO) thin films deposited on LaAlO3 (L
AO) substrates with various perovskite conducting layer including YBa2Cu3O7
(YBCO), SmBa2Cu3O7 (SmBCO), GdBa2Cu3O7 (GBCO) and SrRuO3 (SRO) as bottom e
lectrode in a parallel-plate capacitor configuration were evaluated. The la
ttice mismatch between STO and different electrode materials varies markedl
y, but the dielectric constants of the STO films were not much different fo
r different bottom electrodes. However, lower dielectric loss was observed
in STO films on SRO electrodes. Under the optimum deposition conditions the
tunability was large and the loss tangent was in the range of 0.001-0.01 a
t 1 kHz and zero bias field. (C) 1998 Elsevier Science S.A. All rights rese
rved.