The ion beam materials analysis laboratory at the environmental molecular sciences laboratory

The Environmental Molecular Sciences Laboratory (EMSL), a Department of Ene rgy (DOE) collaborative scientific user facility located at Pacific Northwe st National Laboratory (PNNL), is completing an accelerator facility dedica ted to ion beam modification and analysis of materials. This facility consi sts of a new 3.4 MV tandem accelerator from National Electrostatic Corporat ion (NEC), two ion sources including an Alphatross source and a SNICS sputt er source, and three beam lines. One of the beam lines ( + 30 degrees beam line) is dedicated to ultrahigh vacuum (UHV) materials analysis. The end st ation at this beam line has high-energy ion scattering capabilities includi ng Rutherford backscattering spectrometry (RBS), channeling, nuclear reacti on analysis (NRA), and elastic recoil detection analysis (ERDA), as well as electron spectroscopies such as low-energy electron diffraction (LEED) and Auger electron spectroscopy (AES). This end station is interfaced with the EMSL sample transfer capability which allows a sample to be synthesized, p rocessed, and characterized in different surface science instruments at EMS L without exposing the sample to air. A commercial high vacuum RC43 end sta tion from NEC has capabilities for RES, NRA, ERDA, particle induced X-ray a nd gamma emission (PIXE and PIGE), and is located at the end of the -15 deg rees beam line. A custom high vacuum end station is connected to the +15 de grees beam line and is dedicated to ion implantation. (C) 1999 Elsevier Sci ence B.V. All rights reserved.