Study of intrinsic defects in semiconductors with radioactive probes

Authors
Citation
R. Sielemann, Study of intrinsic defects in semiconductors with radioactive probes, NUCL INST B, 146(1-4), 1998, pp. 329-340
Citations number
19
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
146
Issue
1-4
Year of publication
1998
Pages
329 - 340
Database
ISI
SICI code
0168-583X(199812)146:1-4<329:SOIDIS>2.0.ZU;2-3
Abstract
The use of radioactive probes to study defects in semiconductors is describ ed. We present the application of Moessbauer Spectroscopy (MS) and Perturbe d Angular Correlation Spectroscopy (PAC) with the emphasis on studying intr insic defects (vacancies and self-interstitials). In order to obtain the si mplest possible defect situation the defects are produced in such a way tha t mainly isolated single Frenkel pairs are created. This is done either by the neutrino recoil technique which utilizes the probe atom as the primary knock-on atom or by electron irradiation. Experiments performed with elemen tal and III-V semiconductors are described. It is shown that a wealth of mi croscopic defect information can be obtained. A clean doping of the samples with radioactive probes is fundamental to the experiments. The production of the probes by heavy-ion induced nuclear reactions and their incorporatio n by a recoil implantation technique is a versatile method giving access to a wide variety of probes and allows to utilize short lived species. (C) 19 98 Elsevier Science B.V. All rights reserved.