The use of radioactive probes to study defects in semiconductors is describ
ed. We present the application of Moessbauer Spectroscopy (MS) and Perturbe
d Angular Correlation Spectroscopy (PAC) with the emphasis on studying intr
insic defects (vacancies and self-interstitials). In order to obtain the si
mplest possible defect situation the defects are produced in such a way tha
t mainly isolated single Frenkel pairs are created. This is done either by
the neutrino recoil technique which utilizes the probe atom as the primary
knock-on atom or by electron irradiation. Experiments performed with elemen
tal and III-V semiconductors are described. It is shown that a wealth of mi
croscopic defect information can be obtained. A clean doping of the samples
with radioactive probes is fundamental to the experiments. The production
of the probes by heavy-ion induced nuclear reactions and their incorporatio
n by a recoil implantation technique is a versatile method giving access to
a wide variety of probes and allows to utilize short lived species. (C) 19
98 Elsevier Science B.V. All rights reserved.